Quasi-medium energy ion scattering spectroscopy observation of surface segregation of Ge δ-doped layer during Si molecular beam epitaxy

✍ Scribed by Takashi Fuse; Kiyoshi Kawamoto; Shigenori Kujime; Takashi Shiizaki; Mitsuhiro Katayama; Kenjiro Oura

• Book ID: 117217873
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 425 KB
• Volume: 393
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/s0039-6028(97)00709-7