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Quasi in situ observation of Si lateral solid phase epitaxy

✍ Scribed by T. Ueno; K. Kawai; T. Morisawa; T. Hatano; S. Imai; S. Kaneko; I. Ohdomari

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 867 KB
Volume: 56-58
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(92)90210-o

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