✦ LIBER ✦
Quartz resonator techniques for simultaneous measurement of areal mass density, lateral stress, and temperature in thin films
✍ Scribed by AS Way
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 284 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0042-207X
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