Quantum yield and carbon contamination i
Quantum yield and carbon contamination in thin-film deposition reaction by core-electron excitations
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Yoshiaki Imaizum; Harutaka Mekaru; Tsuneo Urisu
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Article
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1999
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John Wiley and Sons
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English
โ 74 KB
The excitation energy dependence of the reaction quantum yield and the carbon contamination in synchrotron radiation-stimulated aluminum thin-film deposition using the lowtemperature condensed layer of dimethylaluminum hydride (DMAH) were evaluated quantitatively in the vacuum ultraviolet region for