Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns

✍ Scribed by Kok, Pieter; Boto, Agedi N.; Abrams, Daniel S.; Williams, Colin P.; Braunstein, Samuel L.; Dowling, Jonathan P.

• Book ID: 118129371
• Publisher: The American Physical Society
• Year: 2001
• Tongue: English
• Weight: 313 KB
• Volume: 63
• Category: Article
• ISSN: 1050-2947
• DOI: 10.1103/physreva.63.063407