✦ LIBER ✦

Quantitative SIMS of III-V compounds of graded composition without the use of standards

✍ Scribed by M. D. Crapper; A. Chew; R. H. Bradley; D. E. Sykes

Publisher: John Wiley and Sons
Year: 1991
Tongue: English
Weight: 381 KB
Volume: 17
Category: Article
ISSN: 0142-2421
DOI: 10.1002/sia.740170403

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✦ Synopsis

Abstract

A method is proposed for obtaining the matrix element SIMS sensitivity factors for III‐V compounds of the form AB~x~C~1–x~ without using standards. This method tests for variation of sensitivities with concentration and, in the case where no strong variation is shown, allows determination of the sensitivity functions by use of samples where the concentrations of two elements vary continuously over a wide range. This method provides a no‐standards route to quantification of matrix element concentrations in SIMS depth profiles of layers with graded compositions.

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