✦ LIBER ✦
Quantitative scanning electron microscope measurement of resistance of incomplete contact holes in ultralarge scale integrated devices
✍ Scribed by Nishiyama, Hidetoshi; Nozoe, Mari
- Book ID
- 115529286
- Publisher
- The International Society for Optical Engineering
- Year
- 2005
- Tongue
- English
- Weight
- 601 KB
- Volume
- 4
- Category
- Article
- ISSN
- 1932-5150
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