✦ LIBER ✦
Quantitative measurement of O/Si ratios in oxygen-sputtered silicon using 18O implant standards
✍ Scribed by Richard C. Sobers Jr.; Klaus Franzreb; Peter Williams
- Book ID
- 103815921
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 137 KB
- Volume
- 231-232
- Category
- Article
- ISSN
- 0169-4332
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