Quantitative evaluation of SIMS-spectra using Saha-Eggert type equations

✍ Scribed by FG Rüdenauer; W Steiger

• Book ID: 104264125
• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 560 KB
• Volume: 26
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(76)81133-5

✦ Synopsis

Secondary Ion mass spectra of aluminum and steel standards are quantitatively interpreted by a number of different quantitation methods, all based on Saha-Eggert type equations. It is shown that the quality of analysis does not markedly depend on various approximations and simplifications in the correction routines. "Error distribution maps" in T,~le-Space have been drawn which indicate that for an analysis using two internal standard elements certain ambiguities exist in the definition of an optimum constitutional analysis of a given sample.