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Quantitative electron-probe microanalysis of light elements: Determination ofa-Si?C?N?O?H insulating films

✍ Scribed by Willich, Peter ;Obertop, Dieter


Book ID
105132790
Publisher
Springer-Verlag
Year
1989
Weight
515 KB
Volume
98
Category
Article
ISSN
0344-838X

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