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Quantitative elasticity evaluation by contact resonance in an atomic force microscope

โœ Scribed by Yamanaka, K.; Nakano, S.

Book ID
113035272
Publisher
Springer
Year
1998
Tongue
English
Weight
179 KB
Volume
66
Category
Article
ISSN
1432-0630

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The atomic force microscope (AFM) continues to fi nd increasing applications in nanoscale imaging, [ 1 ] metrology, [ 2 ] devices, [ 3 ] and manufacturing. [ 4 ] In these applications, tip size and shape critically affect the accuracy, resolution, and reliability of measurements and processes. [ 5 ]