Quantitative Data Processing in Scanning
โ
,
๐
Article
๐
2013
๐
Elsevier
๐
English
โ 253 KB
Accurate measurement at the nano-scale โ nanometrology โ is a critical tool for advanced nanotechnology applications, where exact quantities and engineering precision are beyond the capabilities of traditional measuring techniques and instruments. Scanning Probe Microscopy (SPM) builds up a picture