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Quantitative correlations between the performance of polysilicon emitter transistors and the evolution of polysilicon/silicon interfacial oxides upon annealing

✍ Scribed by Ajuria, S.A.; Gan, C.H.; Noel, J.A.; Reif, L.R.


Book ID
114534634
Publisher
IEEE
Year
1992
Tongue
English
Weight
924 KB
Volume
39
Category
Article
ISSN
0018-9383

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