Comparison of laser produced and gas dis
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R. Lebert; K. Bergmann; G. Schriever; W. Neff
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Article
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1999
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Elsevier Science
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English
โ 309 KB
Pulsed plasmas, e.g., laser produced plasma (LPP) and gas discharge based pinch plasmas are known as intense sources of soft x-ray and extreme ultraviolet (EUV) radiation in the wavelength interval of about 1 um to beyond 50 nm. They can be generated in compact, laboratory scale devices. Both scheme