✦ LIBER ✦
Quantitative characterization of xenon bubbles in silicon: Correlation of bubble size with the damage generated during implantation
✍ Scribed by Klaus Wittmaack; Helmut Oppolzer
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 809 KB
- Volume
- 269
- Category
- Article
- ISSN
- 0168-583X
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