Quantitative Analysis of 2-D Electrostatic Potential Distributions in 90-nm Si pMOSFETs Using Off-Axis Electron Holography

✍ Scribed by Myung-Geun Han; Fejes, P.; Qianghua Xie; Bagchi, S.; Taylor, B.; Conner, J.; McCartney, M.R.

• Book ID: 114619003
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 593 KB
• Volume: 54
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2007.908901