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Quantification of the surface stress in microcantilever biosensors: revisiting Stoney’s equation

✍ Scribed by Tamayo, Javier; Ruz, Jose J; Pini, Valerio; Kosaka, Priscila; Calleja, Montserrat

Book ID
120015630
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
700 KB
Volume
23
Category
Article
ISSN
0957-4484

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