Quantification of SiGe layer composition using MCs+ and MCs2+ secondary ions in ToF-SIMS and magnetic SIMS

✍ Scribed by D. Marseilhan; J.P. Barnes; F. Fillot; J.M. Hartmann; P. Holliger

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 263 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.06.048