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Quantification of antimony depth profiles in Sb-doped tin dioxide thin films

✍ Scribed by Sari Lehto; Reijo Lappalainen; Heli Viirola; L. Niinistö

Book ID
113022331
Publisher
Springer
Year
1996
Tongue
English
Weight
206 KB
Volume
355
Category
Article
ISSN
1618-2650

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Improved depth resolution in Auger depth
Improved depth resolution in Auger depth profiles of TiN thin films by optimized sputtering parameters
✍ W. Pamler; E. Wildenauer; A. Mitwalsky 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 662 KB

## Abstract The depth resolution in Auger in‐depth profiles of TiN thin films on smooth Si substrates is determined by the evolution of a sputter‐induced surface roughness. It is shown that this effect depends critically on the ion angle of incidence. Therefore, the depth resolution can be improved