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Quantification of amorphous SiC: H films using XPS and AES with three standards

✍ Scribed by A. G. Fitzgerald; A. E. Henderson; S. E. Hicks; P. A. Moir; B. E. Storey

Publisher: John Wiley and Sons
Year: 1989
Tongue: English
Weight: 456 KB
Volume: 14
Category: Article
ISSN: 0142-2421
DOI: 10.1002/sia.740140614

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