✦ LIBER ✦
Quality improvement of chemical-mechanical wafer planarization process in semiconductor manufacturing using a combined generalized linear modelling - non-linear programming approach
✍ Scribed by Fan, Shu-Kai S.
- Book ID
- 121218761
- Publisher
- Taylor and Francis Group
- Year
- 2000
- Tongue
- English
- Weight
- 755 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0020-7543
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