Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

✍ Scribed by Jian Lu; Tsuyoshi Ikehara; Takeshi Kobayashi; Ryutaro Maeda; Takashi Mihara

• Book ID: 106185175
• Publisher: Springer-Verlag
• Year: 2006
• Tongue: English
• Weight: 393 KB
• Volume: 13
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-006-0272-2