Quality based design approach for a single crystal silicon microactuator using DOE technique and response surface model

✍ Scribed by S. Chen; J. Yang; J. Mou; Y. Lu

• Book ID: 106184445
• Publisher: Springer-Verlag
• Year: 2002
• Tongue: English
• Weight: 218 KB
• Volume: 8
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-001-0128-8