Qualitative doping area characterization of SONOS transistor utilizing scanning capacitance microscopy (SCM) and scanning spread resistance microscopy (SSRM)

✍ Scribed by Jinhee Heo; Deoksu Kim; Chung woo Kim; Ilsub Chung

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 846 KB
• Volume: 124-125
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2005.08.097