Quadruply self-aligned MOS (QSA MOS)—A new short-channel high-speed high-density MOSFET for VLSI

✍ Scribed by Ohta, K.; Yamada, K.; Saitoh, M.; Shimizu, K.; Tarui, Y.

• Book ID: 114593469
• Publisher: IEEE
• Year: 1980
• Tongue: English
• Weight: 888 KB
• Volume: 27
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1980.20039