✦ LIBER ✦
Pyrolysis of various organosilazanes used as single precursor of SiNxCy:H films OMCVD process
✍ Scribed by F. Maury; Z. Hatim; A. Reynes; R. Morancho
- Book ID
- 104175919
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 860 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0165-2370
No coin nor oath required. For personal study only.