Pyrolysis effect of group V vapor sources on the composition ranges for metal-organic vapor phase epitaxy growth of III-V semiconductors

✍ Scribed by Changrong Li; Weijing Zhang; Fuming Wang

• Book ID: 107465300
• Publisher: ASM International
• Year: 2004
• Tongue: English
• Weight: 122 KB
• Volume: 25
• Category: Article
• ISSN: 1054-9714
• DOI: 10.1007/s11669-004-0170-1