Low-cost thin film pressure transducer
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K Rajanna; MM Nayak; R Krishnamurthy; S Mohan
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Article
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1997
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Elsevier Science
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English
β 571 KB
A flat diaphragm type pressure transducer with an anodised insulating layer and thin Pt-film as a strain gauge has been designed and made. Thepapergives details of the diaphragm and the information on the anodisation process employed. Sputtering was used for the deposition of the Pt-film strain gaug