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PVDF sensors with low-temperature bonding techniques

✍ Scribed by S. Webster; T.D. Binnie

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
397 KB
Volume
49
Category
Article
ISSN
0924-4247

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A new Sn02 low temperature deposition technique for integrated gas sensors is presented. Two different film thicknesses are investigated, as well as different catalysts . A correlation is established between the deposition parameters, the texture of the layers and the gas sensitivities . An explanat