✦ LIBER ✦
Pure-silica zeolite thin films by vapor phase transport of fluoride for low-k applications
✍ Scribed by Heather K. Hunt; Christopher M. Lew; Minwei Sun; Yushan Yan; Mark E. Davis
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 511 KB
- Volume
- 128
- Category
- Article
- ISSN
- 1387-1811
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