Pulsed plasma ion source to create Si nanocrystals in SiO2 substrates

✍ Scribed by A. Lorusso; V. Nassisi; G. Congedo; N. Lovergine; L. Velardi; P. Prete

• Book ID: 104002725
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 518 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.08.030