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Pulsed laser irradiation of silicon multilayers: A numerical model

✍ Scribed by A. Aydinli; Y. Gündüç; C. Topaçli


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
495 KB
Volume
138
Category
Article
ISSN
0375-9601

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We have investigated the optical properties of silicon pillars formed by cumulative nanosecond pulsed excimer laser irradiation of single-crystal silicon in vacuum created under different repetition rates. The changes in optical characteristics of silicon pillar were systematically determined and co