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Pulsed laser deposition: a new technique for deposition of amorphous SiOx thin films

✍ Scribed by J.M. Lackner; W. Waldhauser; R. Ebner; W. Lenz; C. Suess; G. Jakopic; G. Leising; H. Hutter

Book ID: 108423128
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 522 KB
Volume: 163-164
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(02)00612-6

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