✦ LIBER ✦
Pulsed laser crystallization and doping for the fabrication of high-quality poly-Si TFTs
✍ Scribed by E. Fogarassy; H. Pattyn; M. Elliq; A. Slaoui; B. Prevot; R. Stuck; S. de Unamuno; E.L. Mathé
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 846 KB
- Volume
- 69
- Category
- Article
- ISSN
- 0169-4332
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