Pulsed dc Magnetron Discharges and their Utilization in Plasma Surface Engineering

✍ Scribed by J. Vlček; A. D. Pajdarová; J. Musil

• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 615 KB
• Volume: 44
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.200410083