Pt and RuO2 Bottom Electrode Effects on Pb(Zr,Ti)O3 Memory Capacitors

✍ Scribed by Park, Young; Jeong, Se Min; Moon, Sang Il; Jeong, Kyu Won; Kim, Sung Hoon; Song, Joon Tae; Yi, Junsin

• Book ID: 115457208
• Publisher: Institute of Pure and Applied Physics
• Year: 1999
• Tongue: English
• Weight: 258 KB
• Volume: 38
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/jjap.38.6801