✦ LIBER ✦
Proximity X-ray lithography as a quick replication technique in nanofabrication: Recent progress and perspectives
✍ Scribed by Y. Chen; F. Rousseaux; A.M. Haghiri-Gosnet; R.K. Kupka; M.F. Ravet; G. Simon; H. Launois
- Book ID
- 103599552
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 1011 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0167-9317
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