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Proton micromachining: a new technique for the production of three-dimensional microstructures

✍ Scribed by J.A. van Kan; J. L. Sanchez; T. Osipowicz; F. Watt

Publisher: Springer-Verlag
Year: 2000
Tongue: English
Weight: 314 KB
Volume: 6
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s005420050002

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