Proton beam writing nanoprobe facility design and first test results

✍ Scribed by J.A. van Kan; P. Malar; Armin Baysic de Vera; Xiao Chen; A.A. Bettiol; F. Watt

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 397 KB
• Volume: 645
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2010.12.011