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Proton beam lithography at the University of Surrey’s Ion Beam Centre

✍ Scribed by P. Mistry; I. Gomez-Morilla; G.W. Grime; R. Webb; C. Jeynes; R. Gwilliam; A. Cansell; M. Merchant; K.J. Kirkby

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 205 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.128

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