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Proton beam lithography at the University of Surrey’s Ion Beam Centre

✍ Scribed by P. Mistry; I. Gomez-Morilla; G.W. Grime; R. Webb; C. Jeynes; R. Gwilliam; A. Cansell; M. Merchant; K.J. Kirkby


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
205 KB
Volume
242
Category
Article
ISSN
0168-583X

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