✦ LIBER ✦
Proton backscattering investigation of deformed layers formed at treatment of surface of semiconductor materials: V P Alekhin et al, Struct Defects in Semicon, Coll, Novosibirsk 1973, 166–169 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 162 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0042-207X
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