ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon

✍ Scribed by Rosminazuin Ab Rahim, Badariah Bais, Burhanuddin Yeop Majlis…

• Book ID: 120914934
• Publisher: Springer-Verlag
• Year: 2013
• Tongue: English
• Weight: 714 KB
• Volume: 19
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-013-1794-z