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Prospects for development of nanometrology

✍ Scribed by V. S. Aleksandrov; N. N. Trunov; A. A. Lobashev

Publisher: Springer US
Year: 2010
Tongue: English
Weight: 166 KB
Volume: 53
Category: Article
ISSN: 0543-1972
DOI: 10.1007/s11018-010-9586-7

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