Proposed method for fabricating 50-nm-period gratings by achromatic holographic lithography

✍ Scribed by Yen, Anthony ;Schattenburg, M. L ;Smith, Henry I.

• Book ID: 115342114
• Publisher: The Optical Society
• Year: 1992
• Tongue: English
• Weight: 329 KB
• Volume: 31
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.31.002972