Proposal of at-wavelength PDI for EUVL optics alignment by using a compact undulator

✍ Scribed by Y. Gomei; K. Sugisaki; Y. Zhu; M. Niibe

• Book ID: 114155428
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 194 KB
• Volume: 61-62
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(02)00495-1