✦ LIBER ✦
Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater
✍ Scribed by Mitsuteru Kimura; Fumitoshi Sakurai; Hirao Ohta; Tomoyuki Terada
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 296 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0026-2692
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