Proposal for Micromachined Accelerometer, Based on a Contactless Suspension With Zero Spring Constant

✍ Scribed by Poletkin, K.V.; Chernomorsky, A.I.; Shearwood, C.

• Book ID: 115455021
• Publisher: IEEE
• Year: 2012
• Tongue: English
• Weight: 539 KB
• Volume: 12
• Category: Article
• ISSN: 1530-437X
• DOI: 10.1109/jsen.2012.2188831