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Properties of Tungsten Thin Films Produced with

✍ Scribed by S. Roth; C. Ciemniak; C. Coppi; F. v. Feilitzsch; A. Gütlein; C. Isaila; J.-C. Lanfranchi; S. Pfister; W. Potzel; W. Westphal


Book ID
106418384
Publisher
Springer US
Year
2008
Tongue
English
Weight
280 KB
Volume
151
Category
Article
ISSN
0022-2291

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