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Properties of TiAlCN/VCN Nanoscale Multilayer Coatings Deposited by Mixed High-Power Impulse Magnetron Sputtering (HiPIMS) and Unbalanced Magnetron Sputtering Processes—Impact of HiPIMS During Coating

✍ Scribed by Kamath, G.; Ehiasarian, A. P.; Hovsepian, P. Eh.


Book ID
118064892
Publisher
IEEE
Year
2010
Tongue
English
Weight
785 KB
Volume
38
Category
Article
ISSN
0093-3813

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