✦ LIBER ✦
Properties of the fluorine-implanted Si-SiO2 system : G. S. Virdi, C. M. S. Rauthan, B. C. Pathak and W. S. Khokle. Solid-St. Electron.34(8), 889 (1991)
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 110 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.